| 摘要 |
PROBLEM TO BE SOLVED: To obtain a highly reliable piezoelectric element which is not deteriorated in piezoelectric characteristic, by forming a front face of a piezoelectric layer which is accurately smoothed to have a surface roughness of a specific value to the piezoelectric element holding the piezoelectric layer by electrode films. SOLUTION: An insulating layer 31 and a lower electrode film 32 are layered as a diaphragm 3 on a substrate, and a piezoelectric layer 41 and an upper electrode film 42 are layered as a piezoelectric element 4 in a recording head. A surface of the piezoelectric layer 41 is smoothed accurately by grinding to a smooth face 44 of an arithmetic average roughness of 25 nm or smaller. The piezoelectric layer 41 is formed of a material changing a volume greatly when a voltage is impressed thereto, specifically titanate zirconate. Moreover, the upper electrode film 42 is a conductive electrode film formed of good conductive and chemically and physically stable material, preferably gold (Au) or platinum (Pt). A thickness of the upper electrode film 42 is set to keep uniformity as the electrode film, for example, approximately 0.1 μm. |
