| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an energy dispersion type X-ray micro analyzer which can indicate both images of electron microscope and EDX (X-ray analyze) in an easily visible form through simple operation even when the indication screen is small. SOLUTION: This analyzer consists of an electron microscope 2, an energy dispersion type X-ray analyzer 3 and a computer 1 for controlling them, and it indicates the electron microscope image 5 obtained by the electron microscope 2 and the X-ray spectrum and X-ray image 6 obtained by the X-ray analyzer 3, on the screen 4A of an indicator 4 connected to the computer 1. In this case, the indication pattern of both the images 5 and 6 is preset to indicate the image corresponding to the analysis mode.</p> |
