ULTRA HIGH VACUUM SURFACE OBSERVATION DEVICE,申请号JP19970054803-传众专利搜索

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发明名称	ULTRA HIGH VACUUM SURFACE OBSERVATION DEVICE
摘要
申请公布号	JPH10255711(A)	申请公布日期	1998.09.25
申请号	JP19970054803	申请日期	1997.03.10
申请人	JEOL LTD	发明人	AOKI SUSUMU
分类号	G01N37/00;G01Q30/02;G01Q60/10;H01J37/28;(IPC1-7):H01J37/28	主分类号	G01N37/00
代理机构		代理人
主权项
地址

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