发明名称 DRIVE AND DRIVE DEVICE OF OSCILLATING ACTUATOR
摘要 PROBLEM TO BE SOLVED: To conduct very small movements with a burst signal by permitting selection of a first driving condition, and a second driving condition which applies either of a first driving signal or a second driving signal, whose phases are different from each other, to either of the first electric energy input part or the second electric energy input part to generate oscillations. SOLUTION: In the case that a relatively moving member 30 is controlled so as to conduct very small drives in an arrowhead (a) direction, a controller 110 outputs a control signal, so as to oscillate a burst wave for an oscillator 11. With a switch 115 connected to A side, the output from an amplifier 113 is outputted only to a piezoelectric body 12a. The output from the switch 115 is applied to the piezoelectric body 12a as the first drive signal. The relatively moving member 30 is driven in the arrowhead (a) direction. In the constitution in which the relatively moving member 30 is fixed and an oscillating actuator 10 runs by itself, driving the oscillating actuator 10 in the arrowhead (a) direction, the output from an amplifier 113 is outputted only to a piezoelectric body 12b with the switch 115 connected a to B side.
申请公布号 JPH10234191(A) 申请公布日期 1998.09.02
申请号 JP19970281768 申请日期 1997.10.15
申请人 NIKON CORP 发明人 MATSUMOTO TAKESHI
分类号 H02N2/00;H01L41/04;H02N2/06 主分类号 H02N2/00
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