POWER SUPPLY UNIT FOR SPUTTERING DEVICE

摘要

In a circuit for preventing arc discharge by applying a reverse voltage pulse, after completion of application of a reverse voltage pulse, a reverse voltage generated by reverse voltage generating means (12) within 1-10 mu s in the case where generation of arc discharge is detected by arc discharge detecting means (23), is applied to a sputtering source, thereby lowering the generation probability of continuous arc discharge. At the same time, a currrent at the time of application of the reverse voltage is limited by a diode (D10) connected in series with the sputtering source (14) and a resistor (r10) connected in parallel with the diode (D10), thereby reducing continuous arc discharge due to reverse arc discharge.