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发明名称
A compact reticle/wafer alignment system
摘要
申请公布号
EP0458354(B1)
申请公布日期
1998.08.05
申请号
EP19910108453
申请日期
1991.05.24
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
AOKI, SHINICHIRO;SATO, TAKEO;YAMAMOTO, MASAKI;TAKEUCHI, HIROYUKI;ARAKI, NOBUHIRO;SUGIYAMA, YOSHIYUKI
分类号
G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G03F9/00
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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