发明名称 |
Method forming preferred orientation-controlled platinum films using nitrogen |
摘要 |
<p>Platinum film orientation-controlled to (111), (200) and/or (220) are provided by depositing the platinum film under an atmosphere containing nitrogen as well as an inert gas (Ar, Ne, Kr, Xe) on a substrate heated to temperature ranged from room temperature to 500 DEG C, and then annealing to substantially remove nitrogen introduced into the platinum film during the deposition thereof. The platinum film formed in this process has an excellent electrical conductivity (resistivity is lower than 15 mu OMEGA -cm), good enough adhesion strength to be used for electronic devices, and does not show hillocks, pores or pinholes.</p> |
申请公布号 |
EP0853336(A2) |
申请公布日期 |
1998.07.15 |
申请号 |
EP19980400019 |
申请日期 |
1998.01.07 |
申请人 |
TONG YANG CEMENT CORPORATION |
发明人 |
PARK, DONG YEON;LEE, DONG SU;WOO, HYUN JUNG;CHUN, DONG IL;YOON, EUI JUN |
分类号 |
H01L21/28;C23C14/16;C23C14/58;C25D3/50;C25D5/50;C25D7/12;H01L21/02;H01L21/3205;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L21/320 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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