Self-diagnostic accelerometer with symmetric proof-mass and its preparation method

摘要

A symmetrical proof-mass accelerometer with a self-diagnosis capability and its fabrication method are disclosed. The accelerometer has symmetrical mass distribution with respect to the plane of the cantilever beam with an offset between upper and lower masses, so as to minimize cross-axis sensitivity and facilitate self-diagnostic resistor installation. This accelerometer can be applied to automobile electronics systems, consumer electronics, and industrial electrical measurement systems, which require measurements of displacement, velocity, vibration, acceleration, angular acceleration and their changes.