| 发明名称 |
Anti-reflective coating composition |
| 摘要 |
An anti-reflective coating composition comprising a polyimide dissolved in an organic solvent is used to form an anti-reflective coating beneath a chemical amplification type resist layer. The composition allows a fine resist pattern to be formed with high accuracy in a convenient, efficient, reproducible manner.
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| 申请公布号 |
US5772925(A) |
申请公布日期 |
1998.06.30 |
| 申请号 |
US19970891000 |
申请日期 |
1997.07.10 |
| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
WATANABE, SATOSHI;ISHIHARA, TOSHINOBU;KANEKO, ICHIRO;OIKAWA, KATSUYUKI;TAKEDA, YOSHIHUMI |
| 分类号 |
G03F7/11;C08G73/10;C08L79/08;C09D179/08;G02B1/11;H01L21/027;(IPC1-7):F21V9/00;B05B5/00;B05D5/06 |
主分类号 |
G03F7/11 |
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