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发明名称
AIR FEEDING FACILITY OF CLEAN ROOM
摘要
申请公布号
JPH10170044(A)
申请公布日期
1998.06.26
申请号
JP19960332178
申请日期
1996.12.12
申请人
TAISEI CORP
发明人
SHIGIHARA SHINICHI;KISHINO YUTAKA;WAKAYAMA YOSHIHIDE
分类号
F24F7/06;(IPC1-7):F24F7/06
主分类号
F24F7/06
代理机构
代理人
主权项
地址
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