| 发明名称 |
Photolabile polymers with triazene or/and pentazadiene building blocks |
| 摘要 |
The invention concerns the use of triazene or/and pentazadiene polymers as photoresists and in particular as positive photoresists in order to cover biochemical reagents. In addition the invention concerns a new process for the production of triazene or/and pentazadiene polymers.
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| 申请公布号 |
US5770685(A) |
申请公布日期 |
1998.06.23 |
| 申请号 |
US19960606682 |
申请日期 |
1996.02.26 |
| 申请人 |
BOEHRINGER MANNHEIM GMBH |
发明人 |
STEBANI, JUERGEN;NUYKEN, OSKAR;SLUKA, PETER;FINCKH, PETER |
| 分类号 |
C08G73/00;C09D179/00;G03F7/039;H01L21/027;H01L21/30;(IPC1-7):C08G83/00 |
主分类号 |
C08G73/00 |
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