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发明名称
VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPH10152769(A)
申请公布日期
1998.06.09
申请号
JP19960314431
申请日期
1996.11.26
申请人
MITSUBISHI HEAVY IND LTD;KAO CORP
发明人
SHINYA KENJI;SHIMAKAWA TSUKASA;OKITA HAJIME;MATSUO YUZO;MIZUNOYA HIROHIDE;YAMAMOTO JUN
分类号
C23C14/30;(IPC1-7):C23C14/30
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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