| 摘要 |
PROBLEM TO BE SOLVED: To reduce temperature dependency of a specific resistance value, and expand an applicable temperature range by using an electrostatic chuck member where an insulating film composed of a metallic undercoat and an Al2 O3 -NiO ceramic overcoat laminated on it is arranged on a metallic or carbon substrate. SOLUTION: When this electrostatic chuck member is manufactured, after a surface of a metallic or carbon substrate 1 is activated, a metallic undercoat 2 is executed in a thickness of 30 to 150μm by an arc flame spraying method or an atmospheric plasma flame sparying method by using metal such as Ni, Al, Cr, Co, Mo and W or these alloy as a flame spraying material. An Al2 O3 - NiO ceramic overcoat 3 is executed on it by an atmospheric flame spraying method or a reduced pressure flame spraying method, and a mixing rate of NiO is preferable to be in a range of 4 to 10%.
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