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发明名称
SUBSTRATE PROCESSING DEVICE
摘要
申请公布号
JPH10154683(A)
申请公布日期
1998.06.09
申请号
JP19960327906
申请日期
1996.11.22
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
NAKAGAWA YOSHIYUKI
分类号
B08B3/08;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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