| 摘要 |
<p>PROBLEM TO BE SOLVED: To make an analysis with high precision by providing a Faraday cup, capturing one or more primary electron beams in a sample bed and a hole, through which the primary electron beams pass from the surface of the sample bed to the Faraday cup. SOLUTION: A hole 7, reaching a sample bed 2 from a Faraday cup 3 is preferably set to 20μm or below at the beam diameter of the primary electron beam or above to reduce the probability that the electron beam transmitting a sample 1 again goes out of the Faraday cup 3. The faraday cup 3 is arranged in the sample bed 2 via an insulating material 4 for accurately matching an analysis point and the hole 7 of the Faraday cup 3 and shorten the path of the primary electron beam transmitting the sample 1. The sample 1 is fixed to the sample bed 2, having the Faraday cup 3 inside. The hole 7 reaching the surface of the sample bed 2 from the Faraday cup 3 is matched with the analysis position. When the analysis position in the sample 1 and the hole 7, visible slightly through the thinned sample 1, are observed by an optical microscope, the hole 7 can be easily matched with the analysis position.</p> |
