| 摘要 |
A piezoelectric or ferroelectric microresonator of tuning fork configuration has an overall length of from about 100 mils to 500 mils, and a width of from about 15 mils to about 50 mils. In a typical embodiment, the microresonator includes a thin film electrode extending across the bottom surface of both tines, and on the top surface, a first set of electrodes extending along the outer tine edges and a second set of electrodes extending along the inner tine edges adjacent the tuning fork slot. The microresonator stem portion may be attached to a substrate by means of a eutectic pedestal or other mounting. Metal film weights at the tine ends may be used for adjusting the frequency of the microresonator, and the tines themselves may be tapered for improved temperature coefficient characteristics. Various other microresonator configurations are disclosed, as is a method for fabricating the tuning forks microlithographically.
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