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发明名称
Metals removal process
摘要
申请公布号
GB9807268(D0)
申请公布日期
1998.06.03
申请号
GB19980007268
申请日期
1996.10.18
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人
分类号
H01L21/302;B08B7/00;C23F1/12;C23F4/00;H01L21/28;H01L21/304;H01L21/306;H01L21/3065;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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