FABRICATION OF AN ELECTRONIC COMPONENT USING CHEMICAL MECHANICAL POLISHING,申请号KR19940032131-传众专利搜索

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发明名称	FABRICATION OF AN ELECTRONIC COMPONENT USING CHEMICAL MECHANICAL POLISHING
摘要
申请公布号	KR0138295(B1)	申请公布日期	1998.06.01
申请号	KR19940032131	申请日期	1994.11.30
申请人	SAMSUNG ELECTRONICS CO.,LTD	发明人	CHOE, JI-HYUN;SHIN, HONG-JAE;HWANG, BYUNG-KEUN;JUNG, WOO-INN
分类号	H01L21/3205;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/320	主分类号	H01L21/3205
代理机构		代理人
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地址

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