发明名称 |
ROTARY CHEMICAL EVAPORATION APPARATUS FOR FORMING THIN FILM |
摘要 |
PURPOSE:To provide an apparatus described in the title for forming multilayer thin film by detecting thin film thickness formed in the former step on a substratum surface placed on a swiveling table, by stopping the film formation when the thickness reached the set value, and by starting the latter formation of thin film. |
申请公布号 |
JPS5365276(A) |
申请公布日期 |
1978.06.10 |
申请号 |
JP19760140670 |
申请日期 |
1976.11.25 |
申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
YONEYAMA TERUO;IIZUKA YASUO;YAMAMOTO SHINICHI;SHIBASAKA MITSUSADA |
分类号 |
C23C16/52;G01B11/06 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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