VAPOR COOLING EQUIPMENT FOR SEMICONDUCTOR ELEMENT,申请号JP19960270696-传众专利搜索

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发明名称	VAPOR COOLING EQUIPMENT FOR SEMICONDUCTOR ELEMENT
摘要
申请公布号	JPH10116947(A)	申请公布日期	1998.05.06
申请号	JP19960270696	申请日期	1996.10.14
申请人	TOSHIBA CORP	发明人	OBE TOSHIHARU;SAITO IKUO
分类号	H01L23/427;(IPC1-7):H01L23/427	主分类号	H01L23/427
代理机构		代理人
主权项
地址

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