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发明名称
MANUFACTURE OF SEMICONDUCTOR WAFER
摘要
申请公布号
JPH10112450(A)
申请公布日期
1998.04.28
申请号
JP19960299202
申请日期
1996.10.04
申请人
KOMATSU ELECTRON METALS CO LTD
发明人
MAEDA MASAHIKO;HARADA YASUMITSU;MOTOURA HISAMI;ASANO HIDEKAZU
分类号
H01L21/306;H01L21/302;H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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