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发明名称
SPIN COATING DEVICE
摘要
申请公布号
JPH1085651(A)
申请公布日期
1998.04.07
申请号
JP19960240468
申请日期
1996.09.11
申请人
GLOBAL MACH KK
发明人
MURAKAMI NOBORU;INADA JUNJI
分类号
G03F7/16;B05C11/08;B05D1/40;H01L21/027;(IPC1-7):B05C11/08
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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