PRODUCTION OF HIGH QUALITY THIN CARBON FILM IN DIAMOND FORM

摘要

PROBLEM TO BE SOLVED: To obtain a high quality thin carbon film in a diamond form almost free from amorphous carbon and having a high transmissivity and high resistance by keeping the energy density of laser beams in a specified range when the thin carbon film in a diamond form is formed on a substrate by vapor deposition by a laser beam ablation method. SOLUTION: When a thin carbon film in a diamond form is formed on a substrate by vapor deposition by a laser beam ablation method, the energy density of laser beams is kept in the range of the lowest limit of energy density for film formation.