,申请号JP19880294520-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JP2732498(B2)	申请公布日期	1998.03.30
申请号	JP19880294520	申请日期	1988.11.24
申请人	HITACHI SEISAKUSHO KK	发明人	TANAKA MINORU;OSHIDA YOSHITADA;YOSHITAKE YASUHIRO;TANIMOTO TETSUZO
分类号	G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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