| 摘要 |
PROBLEM TO BE SOLVED: To provide an adjusting method of an oscillating gyroscope and its oscillator resonance frequency thereby easily performing resonance frequency adjustment of high accuracy so as to protect a sensor chip from damage. SOLUTION: This oscillating gyroscope is provided with a semiconductor substrate processed by an anisotropic etching operation, whereby a sensor chip 1 is formed of an oscillator 2, a frame part 3, and a supporting part 4 with which the oscillator 2 is connected to the frame part 3. A driving piezoelectric element 5 is formed on the surface of the oscillator 2, and detecting piezoelectric elements 5a and 5b are formed on the surface other than the surface on which the driving piezoelectric element 5 is formed in the oscillator 2. In this case, the cutting of the supporting part 4 of the oscillator 4 is performed, or a film 7 having residual stress is formed on the surface of the driving piezoelectric element 5, for adjusting resonance frequency of the oscillating gyroscope. |
