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发明名称
Verfahren zum Abtragen von Kupfer
摘要
申请公布号
DE59501387(D1)
申请公布日期
1998.03.12
申请号
DE19955001387
申请日期
1995.01.30
申请人
EMIL KRECHEN INDUSTRIEVERTRETUNGEN GMBH, 42655 SOLINGEN, DE
发明人
DECKER, GUENTER, D-42655 SOLINGEN, DE
分类号
C23F1/18;C23F1/46;(IPC1-7):C23F1/18
主分类号
C23F1/18
代理机构
代理人
主权项
地址
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