发明名称 STRUCTURE AND METHOD OF FORMING TRANSISTOR DENSITY BASED STRESS LAYERS IN CMOS DEVICES
摘要 A method for increasing carrier mobility of transistors included in an semiconductor device includes forming a stress inducing layer over a plurality of transistors, the transistors formed in regions of varying transistor density, wherein the stress inducing layer is formed at a varying thickness depending on the transistor density, such that the stress inducing layer is thicker in regions of increased transistor density and thinner in regions of decreased transistor density.
申请公布号 US2008087965(A1) 申请公布日期 2008.04.17
申请号 US20060548296 申请日期 2006.10.11
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHEN XIANGDONG;YANG HAINING S.
分类号 H01L21/31;H01L29/78 主分类号 H01L21/31
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