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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH1065063(A)
申请公布日期
1998.03.06
申请号
JP19960222558
申请日期
1996.08.23
申请人
SEIKO EPSON CORP
发明人
YOSHIDA MAKOTO
分类号
H01L23/28;H01L21/56;(IPC1-7):H01L23/28
主分类号
H01L23/28
代理机构
代理人
主权项
地址
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