Optical arrangement of mirrors

摘要

The arrangement has several separate beams (10) in front of a segmented mirror array (13) coming to a common focus (12) and then after reflection at a separate mirror, passing through an objective (15) onto one or more workpieces(16). Between the segmented mirror array and the objective is a further segmented mirror array (14). In another arrangement, following the focus is at least one beam distributer from which the individual beams impinge upon the mirror array. The distributer is rectangular in section, deflecting the beams towards two segmented arrays set at right angles to each other, from which they are reflected back along the same path. In either arrangement, the first-mentioned array comprises movable individual mirrors.