| 摘要 |
PROBLEM TO BE SOLVED: To improve processing accuracy for an article to be processed and to improve yield of the article to be processed by providing two kinds of multi- channel rollers, namely, a resin-made multi-channel roller wherein at least channel parts of the multi-channel roller are constituted of a resin and a ceramic- made multi-channel roller wherein at least channel parts of the multi-channel roller are constituted of a ceramic. SOLUTION: As two multi-channel rollers facing to an article 3 to be processed, namely, multi-channel rollers for a head 1a and 1b, ceramic-made multi-channel rollers wherein wire channel parts are formed of a ceramic are used. As a multi-channel roller 2 for driving, a resin-made multi-channel roller wherein wire channel parts are formed of a resin is used. As two multi-channel rollers for a head 1a and 1b facing to an article 3 to be processed, ceramic-made multi-channel rollers wherein at least wire channel parts are formed of a ceramic are used. By combining the resin-made multi-channel roller and the ceramic-made multi-channel rollers and arranging appropriately them, processing accuracy of the article to be processed is improved. |
