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发明名称
MANUFACTURE OF THIN FILM TRANSISTOR AND ACTIVE MATRIX LIQUID CRYSTAL DISPLAY DEVICE
摘要
申请公布号
JPH1041515(A)
申请公布日期
1998.02.13
申请号
JP19960197658
申请日期
1996.07.26
申请人
TOSHIBA CORP
发明人
SETO TOSHISUKE
分类号
H01L21/316;H01L21/336;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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