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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH1041308(A)
申请公布日期
1998.02.13
申请号
JP19960193574
申请日期
1996.07.23
申请人
SONY CORP
发明人
YANAGIDA TOSHIHARU
分类号
H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/321;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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