| 摘要 |
PROBLEM TO BE SOLVED: To provide a high purity refractory capable of displaying a desired electrical characteristic without being damaged when used as a tool material for mounting at the time of burning an electronic component by reducing impurity such as SiO2 in an oxide based refractory such as Al2 O3 and ZrO2 . SOLUTION: In the high purity refractory, a refractory compact or sintered body containing mainly SiO2 , Fe2 O3 and alkali or alkaline earth metal oxide as impurities is subjected to a heat treatment under a reducing atmosphere to highly purify at least a surface substantially. The heat treatment is executed preferably at 1,200-1,600 deg.C. Further, at least hydrogen is preferably incorporated as the reductive atmosphere. |
