| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear motor device provided with a function of detecting the step out of the moving piece simply and besides surely. SOLUTION: An optical fiber 16 is arranged in the groove 13 made between teeth 11, besides being in the specified position where the moving piece 20 on the stator where a plurality of teeth 11 are arranged in two rows, and it is made a light emitting part 24, and the moving piece 20 is provided with a light receiving part 24 to receive the above light. Here, the step out of the moving piece 20 is judged by judging the existence of the light reception by the light receiving part 24, when the 20 is positioned in the specified position of the stator 10. Moreover, the accuracy in detection of the step out is raised by providing a pair of light receiving elements apart in the diagonal direction of the rectangular moving piece 20. |
