发明名称 Method for fabricating a low light level imager with extended wavelength response employing atomic bonded(fused) semiconductor materials
摘要 <p>An imaging device (10, 10') has a plurality of unit cells (11), that contribute to forming an image of a scene. The imaging device includes a layer of wide bandgap semiconductor (18) material (e.g., silicon) having photogate charge-mode readout circuitry (20, 22, 24), such as CCD or CMOS circuitry, disposed upon a first surface of the layer. In one embodiment a second, opposing surface of the layer is bonded at a heterojunction interface or atomic bonding layer (16) to a surface of a layer of narrower bandgap semiconductor material (e.g., InGaAs or HgCdTe), that is selected for absorbing electromagnetic radiation having wavelengths longer than about one micrometer (i.e., the NIR or longer) and for generating charge carriers. The generated charge carriers are transported across the heterojunction interface for collection by the photogate Charge-mode readout circuitry. The layer of narrower bandgap material may be disposed upon a surface of a transparent substrate, and also may be differentiated into a plurality of mesa structures (14a). In further embodiments the absorbing layer may have an equivalent or a wider bandgap than the layer having the readout circuitry. <IMAGE></p>
申请公布号 EP0820104(A2) 申请公布日期 1998.01.21
申请号 EP19970305053 申请日期 1997.07.09
申请人 RAYTHEON COMPANY 发明人 JACK, MICHAEL D.;KOSAI, KENNETH;ANDO, KEN J.;RHIGER, DAVID R.
分类号 G01J1/02;H01L21/02;H01L27/14;H01L27/146;(IPC1-7):H01L31/035;H01L27/148 主分类号 G01J1/02
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