发明名称 MICROSCOPIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a microscopic device which performs the highly accurate detection of a focusing position and is inexpensive. SOLUTION: In the microscopic device 1 provided with an objective lens 22 condensing illuminating light on a sample 8 placed on a stage 7, a revolver table 20 where the objective lens 22 is moved along an optical axis and a position detecting part 50 detecting the focusing position of the objective lens 22; the position detecting part 50 is provided with a light splitting part 25 integrally moving with the objective lens 22 in an optical axis direction and splitting a part of the illuminating light and a one-dimensional PSD element 10 fixedly provided at a microscope main body having photodetectors arrayed in parallel with an optical axis and detecting the illuminating light split by a light splitting part 25.
申请公布号 JPH1010435(A) 申请公布日期 1998.01.16
申请号 JP19960182802 申请日期 1996.06.24
申请人 NIKON CORP 发明人 ADACHI AKIRA
分类号 G01B11/00;G02B7/28;G02B21/00;G02B21/26;(IPC1-7):G02B21/00 主分类号 G01B11/00
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