DEVICE FORMED BY USING PIEZOELECTRIC MATERIAL, CONDENSER DEVICE AND PRODUCTION OF THESE DEVICES

摘要

PROBLEM TO BE SOLVED: To provide a device which is formed by using a piezoelectric material and is capable of imparting a desired piezoelectric characteristics thereto, a condenser device and a process for producing these devices. SOLUTION: The condenser device 1 is formed by anodically joining a glass substrate 10 to the rear surface of a semiconductor substrate 20. This glass substrate 10 is provided with a light emitting element 14 and an imaging element 12. A diaphragm part 24 is formed on the semiconductor substrate 20 and a surface facing the light emitting element 14 is formed as a mirror surface 26. The front surface of the semiconductor substrate 10 is provided with an insulating film 28. An actuator 30 formed by holding a PZT piezoelectric layer 34 with electrodes 32 and 36 is formed in the position corresponding to the diaphragm part 36 on the insulating film 28. A heater 38 is formed near the piezoelectric layer 34 atop the insulating film 28. The piezoelectric layer 34 where an amorphous phase and pyrochlore phase coexist is heated by the heater 38, by which the phase transition to a perovskite phase is caused. The piezoelectric layer 34 subjected to the heat treatment exhibits a piezoelectric characteristic.