PLASMA-GESTALTUNGS-EINBUCHTUNG ZUR STEUERUNG VON ZERSTAEUBUNGSAETZVERFAHREN,申请号DE19946005722T-传众专利搜索

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发明名称	PLASMA-GESTALTUNGS-EINBUCHTUNG ZUR STEUERUNG VON ZERSTAEUBUNGSAETZVERFAHREN
摘要
申请公布号	DE69405722(T2)	申请公布日期	1998.01.08
申请号	DE19946005722T	申请日期	1994.04.08
申请人	MATERIALS RESEARCH CORP., ORANGEBURG, N.Y., US	发明人	HURWITT, STEVEN, D., PARK RIDGE, NJ 07656, US;HIERONYMI, ROBERT, ROCK TAVERN, NY 12575, US
分类号	H05H1/46;C23F4/00;H01J37/32;H01J37/34;H01L21/302;H01L21/3065;(IPC1-7):H01J37/34	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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