Verfahren zum Herstellen einer rotationsinduzierten Übergitterstruktur,申请号DE1992620600T-传众专利搜索

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发明名称	Verfahren zum Herstellen einer rotationsinduzierten Übergitterstruktur
摘要
申请公布号	DE69220600(T2)	申请公布日期	1998.01.02
申请号	DE1992620600T	申请日期	1992.04.10
申请人	TEXAS INSTRUMENTS INC., DALLAS, TEX., US	发明人	KAO, YUNG-CHUNG, DALLAS, TEXAS 75248, US;LIU, HUNG-YU, RICHARDSON, TEXAS 75082, US;SEABAUGH, ALAN C., RICHARDSON, TEXAS 75082, US;LUSCOMBE, JAMES H., DALLAS, TEXAS 75214, US
分类号	C30B23/02;H01L21/20;H01L21/203;H01L21/205;H01S5/00	主分类号	C30B23/02
代理机构		代理人
主权项
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