发明名称 Method for fabricating an electrical connect above an integrated circuit
摘要 A transfer metal configuration and fabrication process possessing increased probability of intersecting a transverse metallization level are presented, without employing an increase in actual metal thickness. The transfer metal is configured with a non-rectangular transverse cross-section such that the thickness of the electrical connect remains the same, but the transverse contact area of the exposed metal is increased. The entire transfer metal may have the same transverse cross-sectional configuration or have portions with different transverse configurations. If different configurations are employed, each portion of the transfer metal to be transversely intersected has the enhanced cross-sectional configuration. A tiered transverse configuration is presented which facilitates electrical connection of the transfer metal to a metal level on a face of a semiconductor cube structure.
申请公布号 US5691239(A) 申请公布日期 1997.11.25
申请号 US19960600620 申请日期 1996.02.13
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HAKEY, MARK CHARLES;HOLMES, STEVEN JOHN;WURSTHORN, JOHN MICHAEL
分类号 H01L21/98;H01L25/065;(IPC1-7):H01L21/44 主分类号 H01L21/98
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