Perovskite thin-film ink jet transducer

摘要

In the particular embodiments described in the specification, a thin-film PZT piezoelectric transducer ink jet head includes a dielectric layer with electrodes and a thin film piezoelectric layer having a thickness in the range of 1-25 microns including one or more layers of perovskite-seeded PZT material and a further pattern of electrodes on the surface of the PZT layer along with a silicon substrate containing openings to provide ink chambers in the region of the electrodes. An orifice plate affixed to the substrate encloses the ink.