Antriebsapparat und damit ausgestatteter XY-Antriebsapparat

摘要

A drive apparatus and a XY drive apparatus on which it is equipped that accomplishes highly accurate driving and positioning of a driven object by absorbing deflection of a nut in the radial direction while employing a simple construction. Deflection of a nut is absorbed by deflection of flexible portions as a result of said nut being supported by an intermediate member having said flexible portions able to deflect in a radial direction perpendicular to the shaft center of a feed screw.