| 摘要 |
A scanning grating is provided in a photoelectric position measuring system which has three areas per graduation period (d) arranged behind each other in the measuring direction. These areas B1, B2, B3 are structured transversely with respect to the measuring direction X in such a way that transversely diffracted light beams are directed on detectors D0, D1, D2 which are arranged transversely to the measuring direction X. The detectors generate signals which are phase-shifted with respect to each other.
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