| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser equipment capable of preventing magnetic fluid which is used for sealing a rotary shaft part from being subjected to seal breakdown due to pressure difference. SOLUTION: This equipment is provided with the following; medium gas 13, a laser chamber in which the medium gas 13 is enclosed, a blower 3 which is arranged in the laser chamber and circulates the medium gas 13, electrodes which generate laser light in the chamber, and magnetic fluid seals 10, 11 which seals the part between the inside and the outside of the laser chamber, on the outer peripheral part of the rotary shaft of the blower 3, by using magnetic fluid 33. In this case, bearing boxes 4, 5 for housing the magnetic fluid seal 10, 11 parts are installed, and pressurized gas is supplied to the outside the magnetic fluid 33 in the bearing boxes 4, 5. The pressure value of the supplied pressurized gas in the bearing boxes 4, 5 is set between the atmospheric pressure value outside the laser chamber and the pressure value of the inside medium gas 13. |
