Diffraction limited spherical wave generator for e.g. reference wave in interferometer

摘要

The wave generator has an optical splitter (2) in the path of an incident light beam (1) to split the beam into two beams, one (1.1) reflected at the splitter and the other (1.2) passing it. A reference mirror (3) located in the path of one beam reflects it back to the splitter and a lens (4) is disposed in the path of the other beam. A miniature mirror (5) is disposed after the lens and close to its focal point, the reflecting surface of which is perpendicular to the beam direction and its diameter of 0.006 mm being smaller than the zero order of magnitude of diffraction of the lens.