IMPREGNATED CATHODE BASE UNIT, ITS MANUFACTURE AND IMPREGNATED CATHODE

摘要

PROBLEM TO BE SOLVED: To provide an impregnated cathode eliminating necessity for performing a polishing process further without generating a flow of brazing material. SOLUTION: This impregnated cathode is formed by impregnated a base unit, consisting of sintered material of high melting point metal or its alloy, with an emitter. In a content of calcium and phosphor existing as impurity in a grain boundary, in AES analysis, ratio of a peak of calcium and phosphor relating to a peak of high melting point metal or the alloy is set respectively 0.5 or less and 0.2 or less. Deformation Sk of the base unit is -0.7 or more, and a surface is not polished.