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发明名称
摘要
申请公布号
JP2672581(B2)
申请公布日期
1997.11.05
申请号
JP19880183643
申请日期
1988.07.25
申请人
发明人
分类号
H01L29/04;H01L21/20;H01L29/26;(IPC1-7):H01L21/20
主分类号
H01L29/04
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代理人
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