Pyrodetector element having a pyroelectric layer produced by oriented growth, and method for the fabrication of the element

摘要

PCT No. PCT/DE94/00785 Sec. 371 Date Jan. 16, 1996 Sec. 102(e) Date Jan. 16, 1996 PCT Filed Jul. 8, 1994 PCT Pub. No. WO95/02904 PCT Pub. Date Jan. 26, 1995A novel pyrodetector element is produced by oriented growth, with the aid of buffer layers, above a monocrystalline silicon substrate and thus enables the fabrication of an array of pyrodetectors having read-out and amplifier circuitry integrated on the common substrate. Proposed as the buffer layers are yttrium-stabilized zirconium oxide YSZ or magnesium oxide above an interlayer made of spinel.