Method and system for enhancing the surface of a material for cleaning, material removal or as preparation for adhesive bonding or etching

摘要

A system and process for enhancing the surface of a material for cleaning, material removal or preparation for adhesive bonding or etching. An environment is provided which includes a skin region in which charged particles may be generated. An exposure region is spaced from the skin region. A material may be positioned in the exposure region which contains neutral, chemically active particles generated by the charged particles. When the material to be altered is positioned in the exposure region, a desired surface of the material chemically reacts with the neutral, chemically active particles so as to alter the surface as desired for cleaning, material removal or as preparation for adhesive bonding or etching.