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发明名称
ELECTRODE AND DISCHARGE-GENERATING DEVICE
摘要
申请公布号
JPH09283495(A)
申请公布日期
1997.10.31
申请号
JP19960095194
申请日期
1996.04.17
申请人
SONY CORP
发明人
YOSHIKOSHI SHUNICHI
分类号
C30B29/06;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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